Materials: Alu, Stainless Steel, Ceramics
Dimensions in mm (L x B x H): ˜ 40 x 54 x 35 (cross table)
Weight: ~100g. Coverage in mm: 20 x 20 x 20 (XYZ-Modul)
Positioning accuracy: < 100 nm Movement resolution: < 1 nm
Speed range: 1000 µm/sec*. – 0,001 µm/sec.
Position measurement:Linear Encoder
Controller: Microprocessor controller, Joystick
Housing: Desktop box
Travel range:
X = 20 mm, Y = 20 mm, Z = 5mm,
R = unlimited, T = ± 10° mm (manual tilt variation).
