ԭλоƬTEMĤȽӹմ죬Ʒ߷ֱ羵۲⡣˿Ϊ3mm⾶İ˱ΣTEMƷˣΪڶࡹʵԭλоƬΪԱṩ˵ര״ֱƷĤõӦ250MPaĤҲ𣬷dzʺǰصϡѧȷоƷصྻ
100ྻ
ϸѡùĵײ
ȽĹաˮƽ
ǿ
ĤӦ<250Mpa
Ĥ10nm
ڴС2cm
ƽ
ֲڶȵ͡0.5nm
5%
ȡ趨
ᣨ⣩ͼСܼ
ʹõȨϴ Ӧ÷Χ
TEMSEMAFMXRDȦ豸ƷĵĤΪṩȶƷ۲ƽ̨
ҪȴƷ۲⣬ƷԼ1000
ҪѧƷ۲, ᡢǿĸʴ
Ʒ۲⣬象Ĥõԣ
ҪC/CuԪصƷ۲,w̼ԪرĤ
TEMSEMAFMXRDͬ豸ĵһԼϽ⡣
Ʒ
Ʒ | Ĥ | ڳߴ |
SG010Z | 10nm | 0.100.10mm |
SG015Z | 10nm | 0.150.15mm |
SG025Z | 10nm | 0.250.25mm |
SG050Z | 10nm | 0.500.50mm |
SG025A | 15nm | 0.25x0.25mm |
SG050A | 15nm | 0.5x0.5mm |
SG100A | 15nm | 1x1mm |
SG025B | 30nm | 0.25x0.25mm |
SG050B | 30nm | 0.5x0.5mm |
SG100B | 30nm | 1x1mm |
SG025C | 50nm | 0.25x0.25mm |
SG050C | 50nm | 0.5x0.5mm |
SG100C | 50nm | 1x1mm |
SG050D | 100nm | 0.5x0.5mm |
SG025E | 200nm | 0.25x0.25mm |
SG050E | 200nm | 0.5x0.5mm |
ÿа10öоƬ |