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Íâ¿òÏîÄ¿ | ²ÎÊý | Íâ¿ò | ²ÎÊý |
²ÄÁÏ | N/P Ð͹èƬ | µç×èÂÊ | 1~10Q*cm |
µª»¯¹èÏîÄ¿ | ²ÎÊý | µª»¯¹èÏîÄ¿ | ²ÎÊý |
²ÄÁÏ | LPCVD µª»¯¹è | Ó¦Á¦ | <250MPa |
½éµç³£Êý | 6-7 | ½éµçÇ¿¶È | 10 (106V/cm£© |
µç×èÂÊ | 1016¦¸*cm | ´Ö²Ú¶È£¨Ra) | 0.28¡À5% nm |
ÕÛÉäÂÊ@630nm | 2.15-2.17 | ´Ö²Ú¶È(Rms) | 0.40¡À5% nm |
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²úÆ·±àºÅ | Ĥºñ | ´°¿Ú³ß´ç | ¿ò¼Ü´óС |
TE025Z | 10nm | 0.25x0.25mm | 5x5mm |
TE050Z | 10nm | 0.5x0.5mm | 5x5mm |
TE025Y | 20nm | 0.25x0.25mm | 5x5mm |
TE050Y | 20nm | 0.5x0.5mm | 5x5mm |
TE025A | 30nm | 0.25x0.25mm | 5x5mm |
TE050A | 30nm | 0.5x0.5mm | 5x5mm |
TE100A | 30nm | 1x1mm | 5x5mm |
TE025B | 50nm | 0.25x0.25mm | 5x5mm |
TE050B | 50nm | 0.5x0.5mm | 5x5mm |
TE100B | 50nm | 1x1mm | 5x5mm |
TE150B | 50nm | 1.5x1.5mm | 5x5mm |
TE200B | 50nm | 2x2mm | 5x5mm |
TE025C | 100nm | 0.25x0.25mm | 5x5mm |
TE050C | 100nm | 0.5x0.5mm | 5x5mm |
TE100C | 100nm | 1x1mm | 5x5mm |
TE150C | 100nm | 1.5x1.5mm | 5x5mm |
TE200C | 100nm | 2x2mm | 5x5mm |
TE75050C | 100nm | 0.5x0.5mm | 7.5x7.5mm |
TE75200C | 100nm | 2x2mm | 7.5x7.5mm |
TE100300C(5pcs) | 100nm | 3x3mm | 10x10mm |
TE100500C(5pcs) | 100nm | 5x5mm | 10x10mm |
TE010D | 200nm | 0.1x0.1mm | 5x5mm |
TE025D | 200nm | 0.25x0.25mm | 5x5mm |
TE050D | 200nm | 0.5x0.5mm | 5x5mm |
TE100D | 200nm | 1x1mm | 5x5mm |
TE150D | 200nm | 1.5x1.5mm | 5x5mm |
TE200D | 200nm | 2x2mm | 5x5mm |
TE250D | 200nm | 2.5x2.5mm | 5x5mm |
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