AF2 自动对焦（Autofocus)
借由探测器的回馈讯号调整物镜位置，得到待测物焦点，而获得待测物的确实高度（如下左图）。
CF4 共轭焦（Confocal, Laser)
激光光束经由物镜迅速上下移动聚焦于待测物上，此时偵测器能经由孔洞得到最大光的强度，如此侦测器根据此讯号确定其位置（如下右图）。
AF2
CF4
n 应用
ü 集成电路封装和表面贴片技术
ü 厚膜混合电路:膜厚度的自动化测量
ü 精密部件
[1] BGA [2] thick film [3] dispenser dots [4] laminate
n 技术参数
| Scan modules | Measuring range in x,y-direction [mm] | Resolution in x,y-direction [mm] | Positioning range in z-direction [mm] | Max. measuring speed [mm/s] |
| SC 50 | 50X50 | 0.5 | 100 | 50 |
| SC 100 | 100x100 | 0.5 | 100 | 50 |
| SC 150 | 150x150 | 0.5 | 100 | 50 |
| SC 200 | 200x200 | 0.5 | 100 | 50 |
| other dimensions on request | ||||
| Sensors | Resolution z [μm] | Resolution x,y [μm] | Working distance [mm] | Measuring range in z-direction [mm] | Camera (optional) | |
| Confocal point sensor | CF 4 | 0.02 | 1 | 4 | 1.0 | off-axis |
| | CF 13 | 0.02 | 1 | 13 | 1.0 | (BMT5) |
| Autofocus sensor | AF 2 | 0.025/0.0111) | 1 | 2 | 1.5/0.651) | integrated |
| AF 5 | 0.025/0.0111) | 1 | 5 | 1.5/0.651) | (BMT3) | |
| Chromatic white light sensor | CRT 52) | 0.010 | 4 | 5 | 0.3 | off-axis (BMT5) |
| CRT 122) | 0.025 | 4 | 12 | 1.0 | ||
| CRT 162) | 0.075 | 8 | 16 | 3.0 | ||
| Holographic sensor | CP 15 | 3.0 | 12 | 12 | 1.8 | integrated (BMT 4) |
| CP 42 | 6.0 | 15 | 42 | 8.0 | ||
| CP 65 | 10.0 | 25 | 65 | 18.0 | ||
| 1) with restricted measuring range 2) with 1, 4 or 30 kHz measuring frequency available | ||||||
| Modules | |
| System controller | High performance industrial PC, DVD-Writer, network card, Windows XP Professional |
| Cabinet and work table MT 70 | Stable container for electronic modules with work table 1550x800x750 (lxwxh in mm) |
| Granite measuring stand MP 100 | Portal construction, 660x450x497 (lxwxh in mm) for SC 50 to SC 150 |
| Granite measuring stand MP 200 | Portal construction, 680x480x385 (lxwxh in mm) from SC 200 |
| NF μsoft standard software | NanoFocus control and evaluation software, profile and topography representation, roughness calculation compliant with DIN EN ISO |
| Options | |
| NF 3D-Plus | Photo-realistic 3D presentation of topographical data (OpenGL) |
| NF Active X | Interface modules to program individual measurement processes and calculations (Excel/VBA) |
| NF Hybridmaster | Automation tool for the use of μscan® in thick film production incl. SPC and teach in module |
| NF Flatmaster | Automated measurement of straightness, flatness and warpage |
| NF Solder | Automated off-line measurement of fine pitch solderpaste print in SMT production |
| NF AutoScan | Automated measurement of profiles and surfaces at arbitrary measurement points |
