Mini-DM是一款紧凑的经济型可变形反射镜，是实☆验室规模的自适应光学系统与实验研究波前控制的理想选择。活动的镜面区域由三分之二的静电驱动单元进行变形控制，并且通过一体化系统与友好的界面控制能达到1kHz的帧频。
MEMS镜片是一种名为“Mini-DM”的元件，在镜面的背面配备了32个静电致动器，能够通过控制各个静电致动器来抑制波面像差。可用于检查视网膜，能够获取更清晰的图像。BMC表示，选择MEMSC AP的原因是，该公司是唯一能够实现所要求质量及生产再现性的MEMS生产商
Boston Micromachines公司创立于1999年的Boston Micromachines公司是全球提供基于MEMS技术可变形反射镜的领导企业。BMC公司的产品已经在商用自适应光学系统中得到广泛ω 的用途。BMC的可变形反射镜能够用于波前校正，在视网◣膜成像、大气校正、共聚焦显微镜与激光脉冲整形等多个领域均有成功应用。
Advantages of Boston Micromachines Deformabe Mirrors:
Highly reflective metallic coating (Gold or Aluminum)高反射率的金属涂层（金或铝）
No hysteresis无滞
Less than 5 nm repeatability小于5纳米的重复性
Response time down to 45 µs响应时间减少到45微秒
Device lifetime >1 billion cycles at ½ full stroke设备寿命
Low power consumption低功耗
The Multi-DM: A versatile, robust deformable mirror system for advanced wavefront control
The popular and versatile Multi-DM offers sophisticated aberration compensation in an easy-to-use package. With 140 precisely controlled elements and low inter-actuator coupling, this system is ideal for a broad range of applications including as microscopy, retinal imaging, and laser beam shaping. The high speed, high precision driver electronics are easily controlled via USB interface. The DM is available in both continuous and segmented surfaces for adaptive optics or spatial light modulator applications. The DMs are capable of up to 5.5 μm stroke, 20 kHz frame rate*, have sub-nm step size, and zero hysteresis.
* 1.5 μm DM and SLM capable of 20 kHz.
High Order Aberration Correction DM Selection Chart
Measured Zernikes - 140 actuators with low interactuator coupling creates high order Zernike modes. Stroke
1.5 µm
3.5 µm
5.5 µm
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Aperture
3.3 mm
4.4 mm
4.95 mm
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Pitch
300 µm
400 µm
450 µm
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Approx. Mechanical
Response Time
(10%-90%)
<20 μs
<100 μs
<500 μs
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Approx. Interactuator
Coupling (±5%)
25%
35%
40%
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SLM Coupling
0%
DM Specifications
140 actuators (12×12 array without 4 corners)
Coating: Aluminum or Gold
Protective Window with 400–1100 nm or 1550 nm AR Coating
Zero hystereses
Sub-nm average step size
Fill Factor >99% (DM), 98% (SLM)
Surface Finish: <20 nm RMS
Driver Specification
USB 2.0 Interface
120–240 VAC Input
14 bit step resolution
Frame Rate: 8 kHz with 34 kHz burst
Dimensions: 9 " × 7 " × 2.5"
